Linear Motion – H2W Technologies Four Axis Vacuum Compatible Robot!

H2W Motion Control 4 axis Vacuum compatible robot

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Santa Clarita, CA — – Motion Control – H2W introduces a fully vacuum compatible four axis positioning robot (XYθZ). The XY axes are driven by brushless linear motor DR Positioning Stages. The θ axis is a worm gear stage that is driven by a rotary stepper motor under closed loop control in conjunction with an arc-segmented linear encoder. The Z axis linear motion is achieved by using a voice coil positioning stage operating under closed loop position control. The four axes operate under synchronized position control in conjunction with a non-contact analog output position feedback device that is used to control the position with respect to a silicon wafer. The stage includes a fully integrated four axis electronics package that allow each axis to operate under closed loop control.

All components were selected for their low outgassing characteristics and the system was designed to fit within a customer designed vacuum chamber. This motion control robot was designed to perform secondary processing procedures on a silicon wafer while exposed to a vacuum.

The XY axes are driven by three-phase brushless linear motors and are guided by a pair of precision recirculating linear ball bearings. The stage has a (XYθZ) 6″ [152 mm] x 6″ [152 mm] x 20° x 1″ [25 mm] stroke, generates (XYθZ) 20 lbs [88 N] x 20 lbs [88 N] x 10 N-m x 10 lbs [44 N] of continuous force, and (XYθZ) 60 lbs [264 N] x 60 lbs [264 N] x 10 N-m x 30 lbs [132 N] of peak force. The linear axis resolution is 0.2 microns and the rotary axis resolution is 0.29 arc-seconds.


  • Vacuum Compatible
  • Coordinated four axis control
  • Vertical orientation
  • Rotary axis is capable of full 360 degree rotation
  • Includes mounting
  • Small footprint

To View video of H2W Technologies Motion Control Vacuum Compatible Four Axis Positioning Robot in action Click Here!

H2W Technologies, Inc. is dedicated to the design and manufacture of linear and rotary motion products that are used in the motion control industry. The complete line of linear electric motors includes: Single and dual axis linear steppers, DC brush and brushless linear motors, voice coil actuators, and AC induction motors. Also offered is a complete line of ball screw, lead screw and belt driven positioning stages.

Other motion control products include: Limited angle torque motors for compact, limited angular excursion rotary servo applications, 3 phase brushless rotary servo motors with matching digital servo amplifiers and permanent magnet linear brakes for fail-safe, zero power braking for baggage handling and people moving applications as well as amusement park rides.

With over 75 years combined experience in the linear and rotary motion field, the H2W Technologies team of engineers offers the optimal solution to the most demanding motion control, requirements.

For additional information contact Mark Wilson at H2W Technologies, 26470 Ruether Avenue #102, Santa Clarita, CA 91350; Tel: 888-702-0540, Fax: 661-251-2067, E-Mail: or visit the website at

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